Magnesium particle
Deposition
1. reference experiment
1-1 ) A silicon substrate ( Ti - 5 nm , Au - 15 nm ) deposition.
① After washing the silicon substrate with acetone
and dry the substrates with nitrogen.
(To prevent foreign matter on the silicon substrate.)
② After inserting the silicon substrate inside the machine makes a vacuum. (about 2 hours)
③ When the vacuum begins to deposit. (about 30 minutes)
④ When the deposition is complete, and wait until the substrate is cooled down sufficiently. (about 30 minutes)
Figure 3. thermal evaporator
Figure 4. silicon substrates
1-2 ) Measuring the thickness of a thin film coated
on a silicon substrate.
① Remove the tape. And measure the depth.
② left (white part) is thin , right(gray part) is the substrate.
③ Measure the difference between the two parts .
- the left side of the x-axis , y value (height) is larger . => The deposited part
- the right side of the x-axis , y value (height) is smaller. => substrate part
After setting the center value of the two parts ,
calculating the difference between the two median = > depth value
( * If the graph to rise steeply it makes similar values through a feature called 'level'.)
Figure 5. alpha step 500
Figure 7. Measuring the difference
between the two parts
* white area - deposited part
gray area - substrate part
Figure 6. alpha step
diamond tip sensor
Figure 8. Equipment Operation
* scan length: scan to the range setting (Experimental 500μm)
scan speed: 20μm / s
Table 3. Measurement graph
Cr, Au deposition using a thermal evaporator machine
(10 ^(-6) Torr in a vacuum)
① Attach Mg particles (powder, sample 1 : 145.35 um, sample 2 : 261.37 um) to the carbon tape.
② Put the sample into the chamber.
③ The Mg particles were placed onto tape and coated with a 20 nm Chromium
layer at 0.5Å/s, a 40 nm Gold layer at 1 Å/s using Thermal Evaporator.
2. Magnesium nanoparticle
2-1) Cr, Au deposition
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Figure 9. thermal evaporator
Figure 10.
gold crucible
Figure 12.
A double-faced tape is used to attach the sample
Figure 11.
glove box
automatic control